Semiconductor & Display Equipment Components

Enhancing equipment part performance through innovation and R&D
cost reduction, and localization

Large Casting Components

BONDER
MAIN FRAME ASSY' (GC30, 1,350x1,320x1,150)

SAW&SORTER
FRAME+POST+BASE ASSY' (GC30, 1,950 x1,820x1,200)

CUTTING MACHINE BASE (GC30, 2,300x2,300x390)

MAIN BASE (GC30, 1,500x1,650x410)

Z-AXIS FRAME-2 (GCD450, 1,510x1,050x510) 1.6t

STRIP BODY (GCD450, 1,500x1,800x250) 2t

X-AXIS BASE (GCD450, 1,800x800x200) 1.8t

Z Axis Frame (1,100x1,100x1,200) 2.1 ton

Medium & Small Casting Components

ETCH-BODY2LINER_HCK (Gravity Die Casting, AC4C-T6, Ø580x94T)

Y BASE (Sand Casting, AC4C-T6, 950x350x230)

MOTOR HOUSING (Sand Casting, AC4C-T6, Ø186x94T)

Z TIMING PULLEY LOWER HOUSING (Precision Casting, SM45C, 110x60x50)

BLOCK-Y AXIS RAIL (Precision Casting, SUS304, 85x63x60)

EJECTOR BASE (Precision Casting, SM45C, 116x72x60)

SHIELD (Precision Casting, SCS13, Φ175x14, 2kg)

ARM, BASE & Others (Precision Casting, SCS13, 120x35x20 & Others)

JOINT, LINK & Others (Precision Casting, SCS13, 100x20x15 & Others)

HYBRID BLOCK (Sand Casting, SUS304, 209x185x220, 30kg)

Large Precision Machined Components

BASE PLATE(SUS304, 2,860x2,300x80T)

UPPER-SHIELD(A5052, 825x790x185T)

CHAMBER FLANGE(SUS304, Ø400x100)

Octagonal TRANSFER CHAMBER(A5083, 1,388x1,388x350T)

Medium & Small Precision Machined Components

CHAMBER STOCKER(A5052, 500x500x393)

VACCUM CHUCK-TOP (A6061-T6 [ESD Black Coating], 620x450x12T)

CHAMBER FLANGE(A5052, Ø600x100)

X-AXIS MTR BASE(A6061-T6, 234x530x66)

ASSY-FLANGE, WELDING LL(SUS304P, 445x500x16T)

PLATE, SEAL RING(SUS316L, 1,027x380x11T)

SHOWER HEAD (A6061-T6, Φ430x61, 5kg)

RAIL SUPPORT

SUPPORT-I(200X100X120)

SUPPORT-R(200X95X25)

YOKE(390X210X90)

SUPPORT-STB(100X95X25)

Robot Machined Products & Display Rollers

FRAME-DRUM_BODY_RD(Detailed Specifications)

FRAME-DRUM_J3_MID(Detailed Specifications)

FRAME-DRUM_J2_MID(Detailed Specifications)

FRAME-SIS_BODY_01(Detailed Specifications)

POSTs(Φ150x1800) 0.6t

ASSY' Product Group

RING CARRIER UNIT-PRIME(950x1050x100)

STAGE Z-THETA UNIT(360x320x350)

RING CARRIER UNIT-WINAS(800x809x90)

STAGE WAPP UNIT(270x190x310)

Rigidity Testing Equipment (3rd Gen.) - In-house Production (1,440x1,500x2,320)

CTV Boat Inspection Jig (3,000x1,000x840) 0.5 ton

Plazma Vaccum Chamber assy’ (2,000x1,500x2,500)