製品
半導体・ディスプレイ装置部品 ㅣ 産業機械・部品
半導体・ディスプレイ装置部品
革新と研究開発により装置部品の性能を向上
コスト削減と国産化
大型鋳造部品
BONDER
MAIN FRAME ASSY' (GC30, 1,350x1,320x1,150)
MAIN FRAME ASSY' (GC30, 1,350x1,320x1,150)
SAW&SORTER
FRAME+POST+BASE ASSY' (GC30, 1,950 x1,820x1,200)
FRAME+POST+BASE ASSY' (GC30, 1,950 x1,820x1,200)
CUTTING MACHINE BASE
(GC30, 2,300x2,300x390)
MAIN BASE
(GC30, 1,500x1,650x410)
Z-AXIS FRAME-2
(GCD450, 1,510x1,050x510) 1.6t
STRIP BODY
(GCD450, 1,500x1,800x250) 2t
X-AXIS BASE
(GCD450, 1,800x800x200) 1.8t
Z Axis Frame
(1,100x1,100x1,200) 2.1 ton
中小型鋳造部品
ETCH-BODY2LINER_HCK
(重力金型鋳造、AC4C-T6、Ø580x94T)
Y BASE
(砂型鋳造、AC4C-T6、950x350x230)
MOTOR HOUSING
(砂型鋳造、AC4C-T6、Ø186x94T)
Z TIMING PULLEY LOWER HOUSING
(精密鋳造、SM45C、110x60x50)
BLOCK-Y AXIS RAIL
(精密鋳造、SUS304、85x63x60)
EJECTOR BASE
(精密鋳造、SM45C、116x72x60)
SHIELD
(精密鋳造、SCS13、Φ175x14、2kg)
ARM, BASE외
(精密鋳造、SCS13、120x35x20 ほか)
JOINT, LINK외
(精密鋳造、SCS13、100x20x15 ほか)
HYBRID BLOCK
(砂型鋳造、SUS304、209x185x220、30kg)
大型精密加工部品
BASE PLATE(SUS304, 2,860x2,300x80T)
UPPER-SHIELD(A5052, 825x790x185T)
CHAMBER FLANGE(SUS304, Ø400x100)
八角形TRANSFER CHAMBER(A5083, 1,388x1,388x350T)
中小型精密加工部品
CHAMBER STOCKER(A5052, 500x500x393)
VACCUM CHUCK-TOP
(A6061-T6[ESDブラックコーティング]、620x450x12T)
CHAMBER FLANGE(A5052, Ø600x100)
X-AXIS MTR BASE(A6061-T6, 234x530x66)
ASSY-FLANGE, WELDING LL(SUS304P, 445x500x16T)
PLATE, SEAL RING(SUS316L, 1,027x380x11T)
SHOWER HEAD (A6061-T6, Φ430x61, 5kg)
RAIL SUPPORT
SUPPORT-I(200X100X120)
SUPPORT-R(200X95X25)
YOKE(390X210X90)
SUPPORT-STB(100X95X25)
ロボット加工品・ディスプレイローラー
FRAME-DRUM_BODY_RD(詳細仕様)
FRAME-DRUM_J3_MID(詳細仕様)
FRAME-DRUM_J2_MID(詳細仕様)
FRAME-SIS_BODY_01(詳細仕様)
POSTs(Φ150x1800) 0.6t
ASSY' 製品群
RING CARRIER UNIT-PRIME(950x1050x100)
STAGE Z-THETA UNIT(360x320x350)
RING CARRIER UNIT-WINAS(800x809x90)
STAGE WAPP UNIT(270x190x310)
剛性試験装置(第3世代)- 自社製作
(1,440x1,500x2,320)
CTV Boat検査治具
(3,000x1,000x840) 0.5 ton
Plazma Vacuum Chamber assy’
(2,000x1,500x2,500)
×